产品特点/Product Characteristics：

♦ 石墨烯薄膜产业化设备

Graphene film industrialization equipment

♦ 宽幅卷对卷连续生长

Wide roll-to-roll continuous growth

♦ APC系统:真空蝶阀自动控制

APC System: Automatic Control of Vacuum Butterfly Valve

♦ 碳源等工艺气体MFC控制

MFC control of process gas such as carbon source

♦ 薄膜制备过程全自动控制

Automatic control of film preparation process

♦ 三腔室结构

Three-chamber structure

技术指标/Technical Indicators：

♦ 工作温度:800-1050°C

Operating temperature: 800-1050°c

♦ 工艺管材质:石英管

Material of process tube: quartz tube

♦ 铜箔宽度:500mm

lnner diameter of process pipe: medium 550mm

♦ 极限真空度:小于3Pa，可恒压控制

Limit vacuum degree: less than 3Pa, which can be controlled by constant pressure

♦ 恒温区:1000mm、五段控温

Constant temperature zone: 1000mm, five-stage temperature control

♦ 工艺管内径:550mm

lnner diameter of process pipe: medium 550mm

♦ 铜箔运行速度约:100-400mm/min，可调

The running speed of copper foil is about 100-400mm/min, which can be adjusted