产品图片：

产品型号：

NE-550EX

产品介绍：

• 
  

• 1.  Various process experience
  - Carbon for capping, SiC Trench, SiC VIA, SiC Mesa, etc.

•  

• 2. Smooth surface and anisotropy etching
  - Adopting ISM (Inductively Super Magnetron) source

•  

•  3. System line-up
  - NE-550 (1L/UL + 1 Process for carbon etching）