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    刻蚀光栅

    一、标准的刻蚀光栅规格:

    刻线/mm

    闪耀波长nm

    闪耀角度

    色散nm/mr

    12.7x12.7x 6

    25x25x 6

    25x25x 9.5

    30x30x 9.5

    50x50x 9.5

    12.5x25x 6

    12.5x25x 9.5

    25x50x 9.5

    120

    12000

    46 3'

    5.8

    3-4112

    3-8112

    3-2112

    3-3112

    3-5112

    3-6112

    3-1112

    3-7112

    150

    500

    2 8'

    6.66

    3-4155

    3-8155

    3-2155

    3-3155

    3-5155

    3-6155

    3-1155

    3-7155

    300

    300

    2 34'

    3.33

    3-4330

    3-8330

    3-2330

    3-3330

    3-5330

    3-6330

    3-1330

    3-7330

    300

    500

    4 18'

    3.32

    3-4350

    3-8350

    3-2350

    3-3350

    3-5350

    3-6350

    3-1350

    3-7350

    300

    1000

    8 36'

    3.3

    3-4310

    3-8310

    3-2310

    3-3310

    3-5310

    3-6310

    3-1310

    3-7310

    300

    2000

    17 27'

    3.18

    3-4320

    3-8320

    3-2320

    3-3320

    3-5320

    3-6320

    3-1320

    3-7320

    300

    4000

    36 52'

    2.67

    3-4340

    3-8340

    3-2340

    3-3340

    3-5340

    3-6340

    3-1340

    3-7340

    600

    300

    5 9'

    1.66

    3-4630

    3-8630

    3-2630

    3-3630

    3-5630

    3-6630

    3-1630

    3-7630

    600

    400

    6 53'

    1.66

    3-4640

    3-8640

    3-2640

    3-3640

    3-5640

    3-6640

    3-1640

    3-7640

    600

    500

    8 37'

    1.65

    3-4650

    3-8650

    3-2650

    3-3650

    3-5650

    3-6650

    3-1650

    3-7650

    600

    750

    13 0'

    1.62

    3-4675

    3-8675

    3-2675

    3-3675

    3-5675

    3-6675

    3-1675

    3-7675

    600

    1000

    17 27'

    1.59

    3-4610

    3-8610

    3-2610

    3-3610

    3-5610

    3-6610

    3-1610

    3-7610

    600

    1250

    22 1'

    1.55

    3-4612

    3-8612

    3-2612

    3-3612

    3-5612

    3-6612

    3-1612

    3-7612

    600

    1600

    28 41'

    1.46

    3-4616

    3-8616

    3-2616

    3-3616

    3-5616

    3-6616

    3-1616

    3-7616

    830

    800

    19 23'

    1.14

    3-4880

    3-8880

    3-2880

    3-3880

    3-5880

    3-6880

    3-1880

    3-7880

    830

    1200

    29 52'

    1.05

    3-4812

    3-8812

    3-2812

    3-3812

    3-5812

    3-6812

    3-1812

    3-7812

    900

    500

    13 0'

    1.08

    3-4712

    3-8712

    3-2712

    3-3712

    3-5712

    3-6712

    3-1712

    3-7712

    1200

    250

    8 37'

    0.82

    3-4125

    3-8125

    3-2125

    3-3125

    3-5125

    3-6125

    3-1125

    3-7125

    1200

    300

    10 22'

    0.82

    3-4130

    3-8130

    3-2130

    3-3130

    3-5130

    3-6130

    3-1130

    3-7130

    1200

    400

    13 53'

    0.81

    3-4140

    3-8140

    3-2140

    3-3140

    3-5140

    3-6140

    3-1140

    3-7140

    1200

    500

    17 27'

    0.8

    3-4150

    3-8150

    3-2150

    3-3150

    3-5150

    3-6150

    3-1150

    3-7150

    1200

    750

    26 44'

    0.74

    3-4175

    3-8175

    3-2175

    3-3175

    3-5175

    3-6175

    3-1175

    3-7175

    1200

    1000

    36 52'

    0.67

    3-4110

    3-8110

    3-2110

    3-3110

    3-5110

    3-6110

    3-1110

    3-7110

    1800

    240

    12 29'

    0.54

    3-4162

    3-8162

    3-2162

    3-3162

    3-5162

    3-6162

    3-1162

    3-7162

    1800

    500

    26 44'

    0.5

    3-4185

    3-8185

    3-2185

    3-3185

    3-5185

    3-6185

    3-1185

    3-7185

    二、高分辨率的刻蚀光栅规格:

    刻线/mm

    闪耀波长nm

    闪耀角度

    色散mm/mr

    12.7x12.7

    x 6

    25x25

    x 6

    25x25

    x 9.5

    30x30

    x 9.5

    50x50

    x 9.5

    12.5x25

    x 6

    12.5x25

    x 9.5

    25x50

    x 9.5

    120

    12000

    46 3'

    5.78

    3-4219

    3-8219

    3-2219

    3-3219

    3-5219

    3-6219

    3-1219

    3-7219

    150

    500

    2 8'

    6.66

    3-4559

    3-8559

    3-2559

    3-3559

    3-5559

    3-6559

    3-1559

    3-7559

    300

    300

    2 34'

    3.33

    3-4339

    3-8339

    3-2339

    3-3339

    3-5339

    3-6339

    3-1339

    3-7339

    300

    500

    4 18'

    3.32

    3-4359

    3-8359

    3-2359

    3-3359

    3-5359

    3-6359

    3-1359

    3-7359

    300

    1000

    8 36'

    3.3

    3-4229

    3-8229

    3-2229

    3-3229

    3-5229

    3-6229

    3-1229

    3-7229

    300

    2000

    17 27'

    3.18

    3-4329

    3-8329

    3-2329

    3-3329

    3-5329

    3-6329

    3-1329

    3-7329

    300

    4000

    36 52'

    2.67

    3-4349

    3-8349

    3-2349

    3-3349

    3-5349

    3-6349

    3-1349

    3-7349

    600

    300

    5 9'

    1.66

    3-4639

    3-8639

    3-2639

    3-3639

    3-5639

    3-6639

    3-1639

    3-7639

    600

    400

    6 53'

    1.66

    3-4649

    3-8649

    3-2649

    3-3649

    3-5649

    3-6649

    3-1649

    3-7649

    600

    500

    8 37'

    1.65

    3-4659

    3-8659

    3-2659

    3-3659

    3-5659

    3-6659

    3-1659

    3-7659

    600

    750

    13 0'

    1.62

    3-4679

    3-8679

    3-2679

    3-3679

    3-5679

    3-6679

    3-1679

    3-7679

    600

    1000

    17 27'

    1.59

    3-4619

    3-8619

    3-2619

    3-3619

    3-5619

    3-6619

    3-1619

    3-7619

    600

    1250

    22 1'

    1.55

    3-4609

    3-8609

    3-2609

    3-3609

    3-5609

    3-6609

    3-1609

    3-7609

    600

    1600

    28 41'

    1.46

    3-4669

    3-8669

    3-2669

    3-3669

    3-5669

    3-6669

    3-1669

    3-7669

    830

    800

    19 23'

    1.14

    3-4889

    3-8889

    3-2889

    3-3889

    3-5889

    3-6889

    3-1889

    3-7889

    830

    1200

    29 52'

    1.05

    3-4819

    3-8819

    3-2819

    3-3819

    3-5819

    3-6819

    3-1819

    3-7819

    900

    500

    13 0'

    1.08

    3-4719

    3-8719

    3-2719

    3-3719

    3-5719

    3-6719

    3-1719

    3-7719

    1200

    250

    8 37'

    0.82

    3-4129

    3-8129

    3-2129

    3-3129

    3-5129

    3-6129

    3-1129

    3-7129

    1200

    300

    10 22'

    0.82

    3-4139

    3-8139

    3-2139

    3-3139

    3-5139

    3-6139

    3-1139

    3-7139

    1200

    400

    13 53'

    0.81

    3-4149

    3-8149

    3-2149

    3-3149

    3-5149

    3-6149

    3-1149

    3-7149

    1200

    500

    17 27'

    0.8

    3-4159

    3-8159

    3-2159

    3-3159

    3-5159

    3-6159

    3-1159

    3-7159

    1200

    750

    26 44'

    0.74

    3-4179

    3-8179

    3-2179

    3-3179

    3-5179

    3-6179

    3-1179

    3-7179

    1200

    1000

    36 52'

    0.67

    3-4119

    3-8119

    3-2119

    3-3119

    3-5119

    3-6119

    3-1119

    3-7119

    1800

    240

    12 29'

    0.54

    3-4169

    3-8169

    3-2169

    3-3169

    3-5169

    3-6169

    3-1169

    3-7169

    1800

    500

    26 44'

    0.5

    3-4189

    3-8189

    3-2189

    3-3189

    3-5189

    3-6189

    3-1189

    3-7189