森泉光电有限公司
高级会员第2年 参观人数:381664
  • 参考报价:电议
    型号:
    产地:美国
    在线咨询
  • 详细介绍:


    数字精密电子定位系统

    peps®II是在TMC的**peps®(精密电子定位系统)基础上建立的并进行了改善。通过添加一个新的数字控制器使pep®II的使用更简单,提供了更多的功能,并且具有改进的用户界面。peps®II是用于TMC气浮隔振系统的数字式非接触高度控制系统。这种系统通常包含机械高度阀和机械高度传感装置,其应用范围从用于半导体制造设备提高沉降时间和增加产量,到要求噪声性能和稳定的平台的精密实验室环境。

    特性和好处

    ?数字控制,用户友好的LCD接口

    ?用于Gimbal Piston,CSP和Maxdamp的非接触式电动气浮高度控制隔振系统

    ?z轴位置重复性:10微米

    ?通过消除常规机械高度控制系统的杠杆接触点改善隔振性能

    ?气浮前馈功能使z轴对x - y轴运动的反应达到zui 小化

    ?可选“VX”功能集成惯性传感器,用于垂直隔离器共振主动阻尼

    ?比例电子阀。通过使用“开关”或传统电子阀门无脉冲噪声引入

    Specifications-

    Physical Dimensions

    PEPS® II Controller 1.72" (43.7mm) H x 8.0" (203mm) W x 9.4" (240 mm) D

    Weights

    PEPS® II Controller: approximately 3.0 lb (1.2 kg)

    Environmental

    (refer to EN 61010-1: 1993,

    EN 61010-1/A2: 1995)

    For indoor use only, up to an elevation of 2,000 m (6560 ft.)

    Maximum allowable temperature range: 5° C to 35° C

    Maximum allowable humidity: 80% up to 31° C, decreasing linearly to 50% relative humidity at 40° C

    Tolerance in main supply voltage: 85 VAC - 240 VAC

    Over voltage category: 2

    Pollution degree (IEC 664): 2

    Ventilation requirements: 25 mm clearance on sides, 0 mm top and bottom

    Power Requirements

    Power input voltage range: 90-230 VAC

    Input frequency range: 50-60 Hz

    PEPS® II User Interface

    (Front Panel)

    Power switch

    4 menu buttons

    LCD display 20 x 2 characters

    2 diagnostic sockets (BNC-type)

    Three-color status LED

    USB port

    PEPS® II Interface

    (Rear Panel)

    AC power entry with EMI filter

    1 air INPUT snap-in port for 1/4" O.D. tubing

    1 air OUTPUT (Exhaust) snap-in port for 1/4" O.D. tubing

    4 air snap-in ports for 1/4" O.D. tubing (one per isolator)

    DB-25 male inputs-outputs and feedforward socket

    1 Phoenix 0.2" pitch 6 pins GREEN header (vertical proximity sensors)

    1 Phoenix 3.5 mm pitch 6 pins BLACK header(horizontal proximity sensors)

    Grounding threaded stud (#10-32 thread)

    DB-25 F socket: 1x digital Input, 3x geophone sensorsinterface (“-VX” option)

    DB-25 F socket: 1x digital input, 3x current output proximity sensors (optional)

    PEPS® II

    Performance

    Specifications

    Analog inputs (unipolar): 8 x 12 bit (16 bit using over sampling), 0…3.0 V full scale

    Analog inputs (feedforward): 5 x 12 bit

    (16 bit using over sampling), ±9 V full scale

    Analog inputs (unipolar) protection: +5 Volts, -0.5 V clipping

    Analog input (feedforward) protection: ±15 Volts clipping

    Analog outputs: 4 x 12 bit (16 bit with over sampling), 0…3.0 V full scale

    Analog outputs (OPTIONAL): 8 x 16 bit, 0…3.0 V full scale

    Analog output protection: indefinite short circuit protection, +5 Volts clipping

    Digital input voltage rating: 0…+3.3 V, +5 V tolerant (+5 Volts clipping)

    Digital output rating: 0…+3.3 V, 20 mA max.

    Digital I/O protection: +5 Volts, -0.5 Volts clipping

    External available power: +5 VDC, 2.0 A max; +15 VDC, 1.0 A max. (20 Watt max)

    Communication port: USB, appears as RS-232 on PC

    Processor: ARM7TDMI / 41.78 MHz

    Control loop rate: 100 Hz - 2.0 KHz

    Proximity sensors: 3x vertical, (3x horizontal optional) Eddy current, NAMUR 0-20 mA output

    Velocity sensors - geophones (“-VX” option): 3x vertical, current output

    Pneumatic

    Specifications

    Long-term height stability: ±50 microns

    Long-term tilt stability: ±50 micro radians

    Servo valves: 4 x 2-way variable-orifice proportional servo valves

    Valving technique: pure class-A

    Maximum input pressure: 120 PSI or 8.3 Bar or 830 KPa

    Nominal air consumption: 60 slpm (2 scfm)

    Air requirements: clean, dry air, filtered to 20 microns or better

    Fail safe: isolators deflate on power failure or power off

    Pneumatic fittings: 'one touch' quick fittings for 1/4" O.D. hose