Model

Original M3-F

New M3-FS

Lens type(lens not included)

M12x0.5mmAccepts smaller lenses (to M8x0.35) with adapter by special order

M16x1mmAccepts M12x0.5mm with standard adapter. Other sizes by special order

Lens weight*

< 5 grams

< 5 grams (all orientations)

Travel range

up to 1.5 mm

up to 1.5 mm

Housing dimensions

20 x 22 x 16 mmincluding controller

20 x 23 x 16 mm including controller

Max image sensor area (image sensor not included)

17 x 17 mm (see drawing)

17 x 17 mm (see drawing

Max. speed

5 mm/s

5 mm/s

Resolution

0.5 μm

0.5 μm

Repeatability

Uni-directional: +/- 8 μm Bi-directional: +/- 20 μm

Uni-directional: +/- 2.5 μm Bi-directional: +/- 5 μm

Linear accuracy

+/- 30 μm

+/- 12 μm

Static tilt

< +/- 1 degree

< +/- 0.7 degree

Dynamic tilt

< +/- 0.15 degree

< +/- 0.05 degree

Static concentricity

< +/- 0.25 mm

< +/- 0.25 mm

Dynamic concentricity

< +/- 0.02 mm

< +/- 0.002 mm typical

Digital interface

I2C or SPI

I2C or SPI

Input voltage

3.1 to 3.6 VDC

3.1 to 3.6 VDC

Input power**

< 1 Watt (5mm/s with 5g mass)< 0.13 Watts quiescent

< 1 Watt (5mm/s with 5g mass)< 0.13 Watts quiescent

Temperature and humidity***

5°C to 70°C (lower possible) <70% relative humidity non-condensing

5°C to 70°C (lower possible) <70% relative humidity non-condensing

Mean time before failure

>2 million cycles (fixed orientation) or 500，000 cycles (random orientation)

>1 million random-sized steps over the travel range (any orientation)

Weight of module(without lens)

5.8 grams

8 grams

Compliance

CE， RoHS

CE， RoHS

Control interface

Via USB adapter from PC， or directly via I2C or SPI

Via USB adapter from PC， or directly via I2C or SPI

Controller

embedded

embedded