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  • Kashiyama
    参考报价:电议
    型号:真空泵SDE系列
    产地:日本
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  • 详细介绍:


    SDE系列

    Apply screw type rotor with higher performance against by-product. High corrosion resistance from structural materials and temperature control.

    苛刻过程应用示例

    Harsh Process Application Example

    Max的阵容。抽速

    Lineup by Pumping Speed

    **值泵送速度[升/分钟]

    主要产品

    规格。/产品SDE90XSDE120TXSDE200SDE303XSDE603XSDE1203TXSDE20N12TXSDE30N20SDE60N20
    **值抽速
    [升/分钟]*1
    1,3001,5003,3005,00010,00020,00030,00050,000100,000
    极限压强
    [啪]*1
    1.30.5
    电源电压
    (50/60赫兹)
    三相交流200 ~ 220伏,380 ~ 480伏
    功耗[kW]*21.32.82.71.51.63.23.33.7
    尺寸[毫米]*3L690930900100010001080
    W370400400450450515
    H5015009051000950950

    *1)不带N2清洗。*2)大约。极限压力下的值。*3)包装尺寸。
    *联系我们了解国际标准合规性。规格。产品名称如有变更,恕不另行通知。*关于适用的气体,请联系我们。

    S-P曲线

    S-P Curve

    * S-P曲线因组合而异。

    [计]选项

    Dry Pump temperature selection for each process. Select booster pump / pipe heating specification. Supplemental choice of foreline & exhaust-line against by-product. Operational status can be monitored by Centralized Monitoring System (CMS). The total exhaust system of which equipped with abatement(heater, plasma, or combustion model).