FT-351高温四探针电阻率测试系统
FT-351 high temperature four probe resistivity test system
一.概述：overview
采用四探针双电组合测量方法测试方阻和电阻率系统与高温箱结合配置高温四探针测试探针治具与PC软件对数据的处理和测量控制，解决半导体材料的电导率对温度变化测量要求，软件实时绘制出温度与电阻，电阻率，电导率数据的变化曲线图谱，及过程数据值的报表分析.
Adopt four probe double electric combination test method to test square resistance and resistivity system . Combined with high temperature box for special high temperature four-point probe test probe jig with PC software for data processing and measurement control. Meet the test requirements of the conductivity of the semiconductor material to temperature change. Advanced measurement and control software to Real-time render the change curve of temperature and resistance, the resistivity, the electrical conductivity data,and process data values statement analysis.
二.适用行业：Applicable industry:
用于：企业、高等院校、科研部门对导电陶瓷、硅、锗单晶（棒料、晶片）电阻率、测定硅外延层、扩散层和离子注入层的方块电阻以及测量导电玻璃（ITO）和其它导电薄膜等新材料方块电阻、电阻率和电导率数据.
Is widely used in: Corporate. colleges and universities and scientific research departments of conductive ceramics. silicon. germanium single crystal (bar. wafer) resistivity. The determination of silicon epitaxial layer and diffusion layer and ion implantation of square resistance as well as the measurement of conductive glass (ITO) and other new materials such as conductive films square resistance and resistivity and conductivity data.
双电测四探针仪是运用直线四探针双位测量。设计参照单晶硅物理测试方法并参考美国 A.S.T.M 标准。
The double electric four-point probe is used to measure the four probes in a straight line.The design conforms to the national standard of the single-crystal silicon physical test method and the American A.S.T.M standard.
三.型号及参数Models and technical parameters：
规格型号Models | FT-351A | FT-351B | FT-351C |
1.方块电阻范围sheet resistance | 10-5～2×105Ω/□ | 10-6～2×105Ω/□ | 10-4～1×107Ω/□ |
2.电阻率范围resistivity range | 10-6～2×106Ω-cm | 10-7～2×106Ω-cm | 10-5～2×108Ω-cm |
3.测试电流范围test current range | 0.1μA.μA.0μA，100µA，1mA，10mA，100 mA | 1A、100mA、10mA、1mA、100uA、10uA、1uA、0.1uA | 10mA ---200pA |
4.电流精度current accuracy | ±0.1%读数 | ±0.1读数 | ±2% |
5.电阻精度resistance accuracy | ≤0.3% | ≤0.3% | ≤10% |
PC软件界面 PC software interface | 显示：电阻、电阻率、方阻、温度、单位换算、温度系数、电流、电压、探针形状、探针间距、厚度 、电导率 LCD: resistance.resistivity. sheet resistance. temperature.unit conversion. temperature coefficient. current. voltage. probe shape. probe spacing. thickness |
7.测试方式test mode | 双电测量Double electrical measurement |
8.四探针仪工作电源working power | AC 220V±10%.50Hz <30W |
9.误差/ errors | ≤3%（标准样片结果 standard samples） | ≤15% |
温度(选购)Highest temperature (choose and buy) | 常温 Normal temperature -400℃；600℃；800℃；1000℃；1200℃；1400℃；1600℃ |
气氛保护（气体客户自备） Atmosphere protection(Gas was provided by customers themselves) | 常用气体如下：氦(He)、氖(Ne)、氩(Ar)、氪(Kr)、氙(Xe)、氡(Rn)，均为无色、无臭、气态的单原子分子 The usual gases are: helium (He). neon (Ne). argon (Ar). krypton (Kr). xenon (Xe). and radon (Rn). all in colorless. odorless. gaseous monatomic molecules. |
温度精度 Temperature precision | 冲温值 Blunt temperature values：≤1-3℃；控温精度 control precision：±1°C |
升温速度： rate of temperature increase | 常温开始400℃--800℃需要15分钟；800℃-1200℃需要30分钟；1400℃-1600℃需要250分钟—300分钟 About 15 minutes at room temperature to 400 ℃. 800 ℃;800 ℃ to 1200 ℃ need 30 minutes;1400 ℃ to 1600 ℃ to 250 minutes. 300 minutes |
高温材料 High temperature material | 采用复合陶瓷纤维材料，具有真空成型，高温不掉粉的特征Adopt composite ceramic fiber material. have vacuum forming. high temperature not drop powder |
PC软件 PC software | 测试PC软件一套，USB通讯接口，软件界面同步显示、分析、保存和打印数据！ PC software. USB communication interface. software interface synchronization display. analysis. save and print data! |
电极材料 Electrode materials | 钨电极或钼电极 Tungsten electrode or molybdenum electrode |
探针间距 The probe spacing | 直线型探针，探针中心间距：4mm；样品要求大于13mm直径Linear probe. probe center spacing: 4mm;Sample requirements are greater than 13mm diameter |
标配外（选购）： Except standard configuration (optional) | 电脑和打印机1套；2.标准电阻1-5个； 1 . One set computer and printer 2.Standard resistance 1 to 5pcs |
高温电源： High temperature power | 供电：400-1200℃ 电源220V，功率4KW；380V;1400℃-1600℃电源380V；功率9KW： Power supply: 400-1200 ℃ power 220 v. 4 kw power;380 v;1400 ℃ to 1600 ℃ power supply380V ; power 9KW |
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